Experimental Investigation of Thermally Induced Nonlinearities in Aluminum Nitride Contour-Mode MEMS Resonators


The aim of this letter is to experimentally demonstrate that the source of amplitude-frequency (A-f) nonlinearities in aluminum nitride contour-mode MEMS resonators is to be attributed to the softening of the equivalent device Young's modulus due to self-heating effects. Resonators with a center frequency of about 1.16 GHz are here investigated as a case… (More)

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