Excited State Distributions of Hydrogen Atoms in the Microwave Discharge Hydrogen Plasma and the Effect of Electron Energy Probabilistic Function

Abstract

To understand the essentiality of the electron energy distribution function in a low-pressure discharge plasma, an experimental study is carried out on the diagnostics of microwave discharge hydrogen plasma with its discharge pressure ~1 torr in a cylindrical quartz tube. The electron kinetic temperature and density are measured by a Langmuir double probe… (More)

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