Examine the design of the micro torsion mirror using holographic and stroboscopic interferometries

In this paper, the theoretical models of resonant frequencies related to the first torsion mode and the second bending mode of the micro torsion mirror are derived. The design and fabrication of the micro torsion mirror device are also purposed. In the analysis of design of the micro device, the advanced design package COMSOL is used to multi-investigate… CONTINUE READING