Exact analysis of the propagation of acoustic waves in multilayered anisotropic piezoelectric plates

@article{Stewart1994ExactAO,
  title={Exact analysis of the propagation of acoustic waves in multilayered anisotropic piezoelectric plates},
  author={J. T. Stewart and Y.-K. Yong},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
  year={1994},
  volume={41},
  pages={375-390}
}
Exact analysis of the propagation of acoustic waves in multilayered piezoelectric plates is performed using the transfer matrix method. A general technique for analyzing layered piezoelectric resonators under thickness and lateral field excitation is presented and is applied to the study of zinc oxide on silicon thin film resonators. Both one and two-dimensional analysis with general material anisotropy is performed, and a simplified method for incorporating thin conducting electrodes on the… CONTINUE READING
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