Evolution of the MOS transistor-from conception to VLSI

  title={Evolution of the MOS transistor-from conception to VLSI},
  author={Sah Chih-Tang},
  • Sah Chih-Tang
  • Published 1988
  • Materials Science
  • Historical developments of the metal-oxide-semiconductor field-effect transistor (MOSFET) during the last 60 years are reviewed, from the 1928 patent disclosures of the field-effect conductivity modulation concept and the semiconductor triode structures proposed by Lilienfeld to the 1947 Shockley-originated efforts which led to the laboratory demonstration of the modern silicon. MOSFET in 1960. A survey is then made of the milestones of the past 30 years leading to the latest submicron silicon… CONTINUE READING
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