Evaluation of the piezoelectric properties and voltage generation of flexible zinc oxide thin films.

Abstract

Local piezoresponse and piezoelectric output voltage were evaluated on ZnO thin films deposited by radio-frequency magnetron sputtering on hard Si/Ti/Au and flexible Cu-coated polyimide substrates. Three different thicknesses of ZnO films were studied (285 nm, 710 nm, and 1380 nm), focusing on characteristics like crystallinity, grain size, surface… (More)
DOI: 10.1088/0957-4484/26/21/215704

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