Evaluation of the Phonon Mean Free Path in Thin Films by using Classical Molecular Dynamics

@inproceedings{Choi2007EvaluationOT,
  title={Evaluation of the Phonon Mean Free Path in Thin Films by using Classical Molecular Dynamics},
  author={Soon-Ho Choi and Shigeo Maruyama and Kyung-Kun Kim and J. Lee},
  year={2007}
}
A non-equilibrium molecular dynamic (NEMD) study has been performed to evaluate the phonon mean free path (MFP) of a solid material. Solid argon with a Lennard-Jones (L-J) potential is selected as a simulation material. The thermal conductivity of a thin film plays an important role in the design of nano-electro-mechanical systems (NEMS) or micro-electro-mechanical systems (MEMS) since heat removal from these devices is a crucial factor for their intended proper operations. The values… CONTINUE READING