Evaluation of curvature and stress in 3C-SiC grown on differently

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@inproceedings{Attolini2011EvaluationOC, title={Evaluation of curvature and stress in 3C-SiC grown on differently}, author={Giovanni Attolini and Tullo Besagni and Monica Francesca Bosi and Carrina Ferrari and F. Rossi and Ferenc Riesz and L. Jiang}, year={2011} }