Evaluation of Various Electrode Metals for Ultra-High Purity P-Type Si Surface Barrier Detectors


Metal contacts on UHP p-Si were experimentally investigated. Au was evaporated at the back face of a UHP p-Si wafer to form the ohmic contact. On its front face, electrodes of 11 different metals-Pd, Ag, Au, Ni, Bi, Pb, Sn, Al, Mn, Mg and Sm were evaporated with each electrode area of 0.5 cm2, and the detector characteristics were measured. Mg, Al, Sn and… (More)

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