Evaluating sharpness functions for automated scanning electron microscopy.

@article{Rudnaya2010EvaluatingSF,
  title={Evaluating sharpness functions for automated scanning electron microscopy.},
  author={M. E. Rudnaya and Robert M. M. Mattheij and Joseph M. Maubach},
  journal={Journal of microscopy},
  year={2010},
  volume={240 1},
  pages={38-49}
}
Fast and reliable autofocus techniques are an important topic for automated scanning electron microscopy. In this paper, different autofocus techniques are discussed and applied to a variety of experimental through-focus series of scanning electron microscopy images with different geometries. The procedure of quality evaluation is described, and for a variety of scanning electron microscope samples it is demonstrated that techniques based on image derivatives and Fourier transforms are in… CONTINUE READING