Corpus ID: 218763246

Etching process of narrow wire and application to tunable-barrier electron pump.

@article{Norimoto2020EtchingPO,
  title={Etching process of narrow wire and application to tunable-barrier electron pump.},
  author={Shota Norimoto and Shuichi Iwakiri and Masahiko Yokoi and Tomonori Arakawa and Yasuhiro Niimi and Katsuhei Kobayashi},
  journal={arXiv: Mesoscale and Nanoscale Physics},
  year={2020}
}
  • Shota Norimoto, Shuichi Iwakiri, +3 authors Katsuhei Kobayashi
  • Published 2020
  • Physics
  • arXiv: Mesoscale and Nanoscale Physics
  • Single electron sources have been studied as a device to establish an electric current standard for 30 years and recently as an on-demand coherent source for Fermion quantum optics. In order to construct the single electron source on a GaAs/AlGaAs two-dimensional electron gas (2DEG), it is often necessary to fabricate a sub-micron wire by etching. We have established techniques to make the wire made of the fragile 2DEG by combining photolithography and electron beam lithography with one-step… CONTINUE READING

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