Error analysis of compensation cutting technique for wavefront error of KH2PO4 crystal.


Considering the wavefront error of KH(2)PO(4) (KDP) crystal is difficult to control through face fly cutting process because of surface shape deformation during vacuum suction, an error compensation technique based on a spiral turning method is put forward. An in situ measurement device is applied to measure the deformed surface shape after vacuum suction… (More)
DOI: 10.1364/AO.52.006645