Error analysis for CGH optical testing

@inproceedings{Chang1999ErrorAF,
  title={Error analysis for CGH optical testing},
  author={Yuchun Chang and J. Burge},
  booktitle={Optics + Photonics},
  year={1999}
}
Computer generated holograms are widely used in optical testing and metrology. [...] Key Method A study using scalar diffraction model to simulate CGH fabrication errors and their effects on wavefront amplitude and phase functions are presented. Experimental analysis confirms the theoretical model. An example is given at the end to demonstrate one of the many applications of the wavefront sensitivity functions in CGH error budgeting for optical metrology.Expand
Error analysis for aspheric surface testing system
Computer-generated holograms (CGHs) are commonly used in optical interferometry for producing reference wavefronts with desired shapes. Uncertainties from the computer generated hologram (CGH)Expand
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TLDR
A parametric model relating the wavefront errors to the CGH fabrication errors is introduced and methods for measuring the fabrication errors in the C GH substrate, duty cycle, etching depth, and effect of surface roughness are discussed. Expand
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A parametric model is provided that can be used for optimizing the CGH design to give good diffraction efficiency and limited sensitivity to manufacturing errors. Expand
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TLDR
A simplified model is developed and validated that treats the scattering loss from the roughness as an amplitude effect and is used for engineering analysis and a graphical method for understanding the application is provided. Expand
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Abstract This paper presents a method of testing the effect of computer-generated hologram (CGH) fabrication error in a cylindrical interferometry system. An experimental system is developed forExpand
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The metrology of mirrors with an off-axis aspheric or freeform shape can be based on optical testing using a Computer Generated Hologram as wavefront matching element in an interferometric setup.Expand
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