Equivalent magnetic noise of thin film based giant magneto-impedance microsensors

Abstract

The detection limit of thin film giant magneto-impedance (GMI) magnetic sensors has been investigated by measuring their magnetic noise. Samples were patterned by photolithography from sputtered multilayers, in the form of stripes with lengths of 0.5 to 2 mm and widths of 50 to 130 &#x03BC;m. The layer structure [Ni<sub>80</sub>Fe<sub>20</sub>(170nm)/Ti(6nm… (More)

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@article{Fernandez2014EquivalentMN, title={Equivalent magnetic noise of thin film based giant magneto-impedance microsensors}, author={Emilie Fernandez and Alfredo Garc{\'i}a-Arribas and J. M. Barandiaran and A. V. Svalov and G. V. Kurlyandskaya and Christophe P. Dolabdjian}, journal={IEEE SENSORS 2014 Proceedings}, year={2014}, pages={710-713} }