Epitaxial titanium nitride microwave resonators: Structural, chemical, electrical, and microwave properties

  title={Epitaxial titanium nitride microwave resonators: Structural, chemical, electrical, and microwave properties},
  author={Ran Gao and Wenlong Yu and Hao Deng and Hsiang-sheng Ku and Zhisheng Li and Minghua Wang and Xiaohe Miao and Yue Lin and Chunqing Deng},
  journal={Physical Review Materials},
Ran Gao, ∗ Wenlong Yu, Hao Deng, Hsiang-Sheng Ku, Zhisheng Li, Minghua Wang, Xiaohe Miao, Yue Lin, and Chunqing Deng † Alibaba Quantum Laboratory, Alibaba Group, Hangzhou, Zhejiang 311121, P.R.China Westlake Center for Micro/Nano Fabrication, Westlake University, Hangzhou, Zhejiang 310024, P.R.China Instrumentation and Service Center for Physical Sciences, Westlake University, Hangzhou, Zhejiang 310024, P.R.China Hefei National Laboratory for Physical Sciences at the Microscale, University of… 

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