Epitaxial piezoelectric thin films on flexible substrates for microelectromechanical systems

@article{Gibbons2009EpitaxialPT,
  title={Epitaxial piezoelectric thin films on flexible substrates for microelectromechanical systems},
  author={B. J. Gibbons and D. P. Cann and C. T. Shelton},
  journal={2009 International Semiconductor Device Research Symposium},
  year={2009},
  pages={1-2}
}
  • B. J. Gibbons, D. P. Cann, C. T. Shelton
  • Published in
    International Semiconductor…
    2009
  • Materials Science
  • It is well known that the piezoelectric properties of a thin film can be influenced by crystallographic texture. At the extreme case, epitaxial thin films can be deposited on single crystal substrates (with appropriate lattice matching) to effectively achieve a single crystal thin film. Here, the maximum advantage of orientation dependence is found. Typically this has required small, expensive single crystalline substrates. In the past 10 years however, the technique of Ion Beam Assisted… CONTINUE READING

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