Environmental Effects on Dielectric Films in Plastic Encapsulated Silicon Devices

@article{Li2007EnvironmentalEO,
  title={Environmental Effects on Dielectric Films in Plastic Encapsulated Silicon Devices},
  author={Lin Li and Jie Xue and Mudasir Ahmad and M V Brillhart and G-Q. Lu and Zhiquan Luo and Jiwoon Im and P. Ho},
  journal={2007 Proceedings 57th Electronic Components and Technology Conference},
  year={2007},
  pages={755-760}
}
  • Lin Li, Jie Xue, +5 authors P. Ho
  • Published 2007 in
    2007 Proceedings 57th Electronic Components and…
Mechanical integrity of interlayer and intralayer dielectric films and its impact on interconnect reliability has become more important as critical dimensions in ultralarge-scale integrated circuits are continuously reduced and Cu interconnect, low-k dielectrics (Cu/low-k) are widely adopted for the new technology nodes. Mechanical integrity of the… CONTINUE READING