Enhancing the fill-factor of CMOS SPAD arrays using microlens integration

@inproceedings{Intermite2015EnhancingTF,
  title={Enhancing the fill-factor of CMOS SPAD arrays using microlens integration},
  author={G. Intermite and R. Warburton and A. Mccarthy and Ximing Ren and F. Villa and A. Waddie and M. Taghizadeh and Yu Zou and F. Zappa and A. Tosi and G. Buller},
  booktitle={Europe Optics + Optoelectronics},
  year={2015}
}
Arrays of single-photon avalanche diode (SPAD) detectors were fabricated, using a 0.35 μm CMOS technology process, for use in applications such as time-of-flight 3D ranging and microscopy. Each 150 x 150 μm pixel comprises a 30 μm active area diameter SPAD and its associated circuitry for counting, timing and quenching, resulting in a fill-factor of 3.14%. This paper reports how a higher effective fill-factor was achieved as a result of integrating microlens arrays on top of the 32 x 32 SPAD… Expand
A Review of Single-Photon Avalanche Diode Time-of-Flight Imaging Sensor Arrays
Enhanced single-photon time-of-flight 3D ranging.

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