Enhancement of intrinsic emission from ultrathin ZnO films using Si nanopillar template

@inproceedings{Chiang2012EnhancementOI,
  title={Enhancement of intrinsic emission from ultrathin ZnO films using Si nanopillar template},
  author={Tun-Yuan Chiang and Ching-Liang Dai},
  booktitle={Nanoscale Research Letters},
  year={2012}
}
Highly efficient room-temperature ultraviolet (UV) luminescence is obtained in heterostructures consisting of 10-nm-thick ultrathin ZnO films grown on Si nanopillars fabricated using self-assembled silver nanoislands as a natural metal nanomask during a subsequent dry etching process. Atomic layer deposition was applied for depositing the ZnO films on the Si nanopillars under an ambient temperature of 200°C. Based on measurements of photoluminescence (PL), an intensive UV emission corresponding… CONTINUE READING

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