Enhanced thermal stability of magnetic tunnel junctions formed by in situ radiation annealing process on AlOx insulating barriers

@inproceedings{Yoon2005EnhancedTS,
  title={Enhanced thermal stability of magnetic tunnel junctions formed by in situ radiation annealing process on AlOx insulating barriers},
  author={Kap Soo Yoon and Ja Hyun Koo and Jung Yup Yang and Young Ho Do and Won Jun Choi and Chae Ok Kim and Jin Pyo Hong},
  year={2005}
}
An in situ direct radiation annealing (IDRA) technique on the AlOx insulating barrier was performed to enhance the thermal stability of magnetic tunneling junctions (MTJs). Our method was found to improve the dielectric and structural properties of AlOx insulating barrier in MTJs. After the proper IDRA process, the conventional ex situ annealing process exhibited an additional enhancement of thermal stability by significantly reducing the interdiffusion process between Co80Fe20 electrode and… CONTINUE READING