Enhanced sensitivity volatile detection with low power integrated micromechanical resonators.

@article{Karabacak2010EnhancedSV,
  title={Enhanced sensitivity volatile detection with low power integrated micromechanical resonators.},
  author={Devrez M. Karabacak and Sywert H. Brongersma and Mercedes Crego-Calama},
  journal={Lab on a chip},
  year={2010},
  volume={10 15},
  pages={1976-82}
}
Very high aspect (length/thickness) ratio doubly clamped beams with integrated piezoelectric transducers are demonstrated for low power sensing of volatiles. The described approach allows for high yield fabrication of a dense array of suspended resonators that can be individually functionalized. Upon polymer coating, the resonators become highly sensitive to absorption of volatile compounds, allowing for detection at ppm-level concentrations of low-molecular weight analytes. The determined… CONTINUE READING
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