Enhanced positioning precision and in situ macroscopic contacts for shadow-evaporated nanostructures

@article{Stffler2015EnhancedPP,
  title={Enhanced positioning precision and in situ macroscopic contacts for shadow-evaporated nanostructures},
  author={Dominik St{\"o}ffler and Regina Hoffmann-Vogel},
  journal={Journal of Vacuum Science \& Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena},
  year={2015},
  volume={33},
  pages={013201}
}
  • D. Stöffler, R. Hoffmann-Vogel
  • Published 2015
  • Physics
  • Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
The authors present the design of a modular sample holder that offers the possibility of in situ fabrication of metallic nanostructures under ultrahigh vacuum. One of the crucial points is to bridge the gap between the macroscopic leads and the nanostructure itself. This problem is solved by using a set of two different masks. For a precise alignment of the two masks, a magnetic tripod connection system has been developed. With this new system, an alignment precision of 26 μm is obtained. As a… 
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