Enhanced nucleation , smoothness and conformality of ultrananocrystalline diamond ( UNCD ) ultrathin films via tungsten interlayers

Extremely smooth (6 nm RMS roughness over 4 lm), thin (100 nm), and continuous ultrananocrystalline diamond (UNCD) films were synthesized by microwave plasma chemical vapor deposition using a 10 nm tungsten (W) interlayer between the silicon substrate and the diamond film. These UNCD films possess a high content of sp-bonded carbon. The W interlayer… CONTINUE READING