Enhanced by-product desorption via laser assisted electron beam induced deposition of W(CO)6 with improved conductivity and resolution.

Abstract

Nanowires with higher tungsten (W) concentration and enhanced conductivity were grown via the laser assisted electron beam induced deposition (LAEBID) technique using tungsten hexacarbonyl W(CO)6 as the gas precursor. Periodic, pulsed laser irradiation facilitated CO desorption during growth by heating the deposit. Deposit purity improved with laser pulse… (More)
DOI: 10.1088/0957-4484/24/41/415301

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