Energy-filtering TEM at high magnification: spatial resolution and detection limits.

Abstract

Energy-filtering TEM (EFTEM) has turned out to be a very efficient and rapid tool for the chemical characterization of a specimen on a nanometer and even subnanometer length scale. Especially, the detection and measurement of very thin layers has become a great application of this technique in many materials science fields, e.g. semiconductors and hard disk… (More)

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Cite this paper

@article{Grogger2003EnergyfilteringTA, title={Energy-filtering TEM at high magnification: spatial resolution and detection limits.}, author={W. Grogger and Bernhard Schaffer and Kannan M. Krishnan and Ferdinand Hofer}, journal={Ultramicroscopy}, year={2003}, volume={96 3-4}, pages={481-9} }