Energy-filtering TEM at high magnification: spatial resolution and detection limits.

@article{Grogger2003EnergyfilteringTA,
  title={Energy-filtering TEM at high magnification: spatial resolution and detection limits.},
  author={W. Grogger and Bernhard Schaffer and Kannan M. Krishnan and Ferdinand Hofer},
  journal={Ultramicroscopy},
  year={2003},
  volume={96 3-4},
  pages={481-9}
}
Energy-filtering TEM (EFTEM) has turned out to be a very efficient and rapid tool for the chemical characterization of a specimen on a nanometer and even subnanometer length scale. Especially, the detection and measurement of very thin layers has become a great application of this technique in many materials science fields, e.g. semiconductors and hard disk technology. There, the reliability of compositional profiles is an important issue. However, the experimentally obtainable spatial… CONTINUE READING