Energy-filtering TEM (EFTEM) has turned out to be a very efficient and rapid tool for the chemical characterization of a specimen on a nanometer and even subnanometer length scale. Especially, the detection and measurement of very thin layers has become a great application of this technique in many materials science fields, e.g. semiconductors and hard disk… (More)
Fig. 1. Apparent size of an object depending on its real size as a function of spatial resolution (dr) calculated for rectangular intensity profiles. A certain measured size value for an object (e.g. 1.2 nm) is not unambiguously related to its real size (can be anything smaller than 1.2 nm). The curve’s data points were determined by convoluting a rectangular profile by a Gaussian of width dr and measuring the FWHM of the result.