Energy-Based Approach to Adaptive Pulse Shaping for Control of RF-MEMS DC-Contact Switches

@article{Do2012EnergyBasedAT,
  title={Energy-Based Approach to Adaptive Pulse Shaping for Control of RF-MEMS DC-Contact Switches},
  author={Cuong Do and Maryna Lishchynska and M. Cychowski and Kieran Delaney and Martin Hill},
  journal={Journal of Microelectromechanical Systems},
  year={2012},
  volume={21},
  pages={1382-1391}
}
This paper presents a closed-form analysis to design a pre-shaped open-loop driving actuation waveform to reduce the bouncing effect while maintaining fast switching of a microelectromechanical system contact switch. A single-degree-of-freedom model and the principle of energy conservation were utilized to design a shaped voltage waveform to close the switch with low impact speed. The method can easily adapt the voltage waveform to the variance of pull-in voltages due to imperfect manufacturing… CONTINUE READING
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