Energetic particle bombardment of films during magnetron sputtering

@inproceedings{Rossnagel1989EnergeticPB,
  title={Energetic particle bombardment of films during magnetron sputtering},
  author={Stephen M. Rossnagel},
  year={1989}
}
The flux of energetic, neutral particles bombarding the sample location during magnetron sputtering has been measured for several cathode–gas systems of general interest. The technique used a differentially pumped detector placed at the sample location, from 5 to 9 cm from the cathode. The detector screens out charged particles, and measures the secondary electrons produced by energetic neutral bombardment of a collector coated with a thin film of cathode material. The energetic neutral flux… CONTINUE READING

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