Emergent chemical mapping at atomic-column resolution by energy-dispersive x-ray spectroscopy in an aberration-corrected electron microscope.

  title={Emergent chemical mapping at atomic-column resolution by energy-dispersive x-ray spectroscopy in an aberration-corrected electron microscope.},
  author={M.-W. Chu and Sz-Chian Liou and C-P Chang and F. S. Choa and C. H. Chen},
  journal={Physical review letters},
  volume={104 19},
Chemical mapping at atomic-column resolution by energy-dispersive x-ray spectroscopy in a spherical aberration-corrected scanning transmission electron microscope (STEM) has been demonstrated for the 1.47-A dumbbell structure in InGaAs. The structural imaging and the chemical information in the two-dimensional map are directly correlated. Comparisons with the other existing mapping techniques of STEM in conjunction with electron energy-loss spectroscopy were discussed from aspects of ionization… 

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