Embossing on epoxy thermoset polymer using SiO2 coated nickel template

@inproceedings{Byeon2007EmbossingOE,
  title={Embossing on epoxy thermoset polymer using SiO2 coated nickel template},
  author={Kyeong Jae Byeon and Sung Hoon Hong and Ki Yeon Yang and Deok Kee Kim and Heon Lee},
  year={2007}
}
Embossing or imprint lithography is the key-technology for the mass production of nanosized structures with low cost. Currently Si or quartz template which is produced by e-beam or DUV lithography and reactive ion etching, is used. However they are very expensive and easily damaged due to their brittleness. On the other hand, Ni template has high mechanical durability and can be fabricated with low cost by electroplating. However, one of the key obstacles of Ni template is poor antistiction… CONTINUE READING

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