Embedding a Carbon Nanotube across the Diameter of a Solid State Nanopore

  title={Embedding a Carbon Nanotube across the Diameter of a Solid State Nanopore},
  author={E. S. Sadki and S. Garaj and D. Vlassarev and J. Golovchenko and D. Branton},
  journal={Journal of Vacuum Science & Technology B},
  • E. S. Sadki, S. Garaj, +2 authors D. Branton
  • Published 2011
  • Materials Science, Physics
  • Journal of Vacuum Science & Technology B
  • A fabrication method for positioning and embedding a single-walled carbon nanotube (SWNT) across the diameter of a solid state nanopore is presented. Chemical vapor deposition (CVD) is used to grow SWNTs over arrays of focused ion beam (FIB) milled pores in a thin silicon nitride membrane. This typically yields at least one pore whose diameter is centrally crossed by a SWNT. The final diameter of the FIB pore is adjusted to create a nanopore of any desired diameter by atomic layer deposition… CONTINUE READING
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