Embedded 3D BioMEMS for multiplexed label free detection

  title={Embedded 3D BioMEMS for multiplexed label free detection},
  author={Arvind Sai Sarathi Vasan and Ravi Doraiswami and Michael G. Pecht},
  journal={2011 IEEE 61st Electronic Components and Technology Conference (ECTC)},
This paper presents an approach for rapid, label-free, multiplexed detection of biomarkers using an array of RF MEMS shunt capacitors. We have demonstrated two parallel modes of sensing using a single RF MEMS shunt capacitor. Surface stress change and RF signal losses, due to specific biomolecular binding, are the two parallel sensing modes realized. The design and fabrication of RF MEMS shunt capacitor, and the associated signal readout are discussed. Bio-detection ability of an RF MEMS shunt… CONTINUE READING


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