Ellipsometry in Analysis of Surfaces and Thin Films

  title={Ellipsometry in Analysis of Surfaces and Thin Films},
  author={Robert Warren Collins},
An ellipsometry measurement consists of five steps. A light beam is generated in a known polarization state. The beam is reflected from or transmitted through a sample having specularly reflecting plane-parallel surfaces, leading to a linear (frequency-conserving) interaction that changes the polarization state. The polarization state of the reflected or transmitted beam is measured. Parameters are determined that characterize the interaction in terms of the… CONTINUE READING