Eletronical and optical characteristics of atmospheric pressure plasma enhanced chemical vapor deposition (APPECVD) system

Abstract

A dielectric barrier atmospheric pressure plasma discharge system with 13,56 MHz rf power supply and matching unit is built for plasma enhanced chemical vapor and composite deposition purposes. Plasma system is optimized for maximum power transfer by homemade matching circuit and uniform glow discharge is obtained with helium and argon flow. The optical… (More)

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