Electrothermally actuated free space board-to-board optical interconnect with zero power hold

Abstract

We present an electrothermally actuated MEMS lens scanner for board-to-board free-space optical interconnect systems capable of zero standby power. U-shaped thermal brakes, and lens frames are designed, fabricated, and characterized with a vertical cavity surface emitting laser (VCSELs) for dynamic beam steering. We demonstrate up to 170 µm… (More)

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