Electrothermal Frequency Tuning of Folded and Coupled Vibrating Micromechanical Resonators

@inproceedings{Syms1998ElectrothermalFT,
  title={Electrothermal Frequency Tuning of Folded and Coupled Vibrating Micromechanical Resonators},
  author={R. R. A. Syms},
  year={1998}
}
The use of constrained thermal expansion to tune the resonant frequency of vibrating micromechanical resonators is explored. A simple model is developed to predict the power sensitivity obtained with folded and unfolded geometries, including the effects of electrothermal heating, and conduction and convection cooling. It is shown that the sensitivity of folded structures can change sign as the ambient gas pressure is lowered in contrast to the behavior of unfolded structures. Tuning is then by… CONTINUE READING
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