Electrothermal Frequency Tuning of Folded and Coupled Vibrating Micromechanical Resonators

  title={Electrothermal Frequency Tuning of Folded and Coupled Vibrating Micromechanical Resonators},
  author={R. R. A. Syms},
The use of constrained thermal expansion to tune the resonant frequency of vibrating micromechanical resonators is explored. A simple model is developed to predict the power sensitivity obtained with folded and unfolded geometries, including the effects of electrothermal heating, and conduction and convection cooling. It is shown that the sensitivity of folded structures can change sign as the ambient gas pressure is lowered in contrast to the behavior of unfolded structures. Tuning is then by… CONTINUE READING
Highly Cited
This paper has 25 citations. REVIEW CITATIONS


Publications citing this paper.
Showing 1-10 of 20 extracted citations

Tip-based graphene etching for MEMS resonator frequency trimming

2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) • 2013
View 1 Excerpt

Electrostatic frequency tuning of thermal piezoresistive MEMS resonators

2012 IEEE International Frequency Control Symposium Proceedings • 2012
View 1 Excerpt

The Micronium—A Musical MEMS Instrument

Journal of Microelectromechanical Systems • 2012
View 3 Excerpts

Modal control of mechanically coupled NEMS arrays for tunable RF filters

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control • 2010
View 2 Excerpts


Publications referenced by this paper.
Showing 1-10 of 43 references

and R

R.R.A. Syms, B. M. Hardcastle
A. Lawes, “Bulk micromachined silicon comb-drive electrostatic actuators with diode isolation,” Sens. Actuators, vol. A63, pp. 61–67 • 1997

Process for in - plane and out - of - plane single - crystal - silicon thermal microactuators

E. H. Klaassen J. M. Noworolski, J. R. Logan, K. E. Petersen, N. I. Maluf

and N

J. M. Noworolski, E. H. Klaassen, J. R. Logan, K. E. Petersen
I. Maluf, “Process for in-plane and out-of-plane single-crystal-silicon thermal microactuators,” Sens. Actuators, vol. A55, pp. 65–69 • 1996

A micromachined

J. J. Yao, N. C. MacDonald
single-crystal silicon, tunable resonator,” J. Micromech. Microeng., vol. 5, pp. 257–264 • 1995

A micromachined , single - crystal silicon , tunable resonator

N. C. MacDonald
J . Micromech . Microeng . • 1995

and K

K. Tanaka, Y. Mochida, +3 authors K. Atsuchi
Ohwada, “A micromachined vibrating gyroscope,” Sens. Actuators,vol. A50, pp. 111–115 • 1995

SCREAM I : A single - mask , single - crystal silicon , reactive ion etching process for microelectromechanical structures

N. C. MacDonald
Sens . Actuators • 1994

SCREAM I: A single-mask

K. A. Shaw, Z. L. Zhang, N. C. MacDonald
single-crystal silicon, reactive ion etching process for microelectromechanical structures,” Sens. Actuators, vol. A40, pp. 63–70 • 1994

and M

M. Hashimoto, C. Cabuz, K. Minami
Esashi, “Silicon resonant angular rate sensor using electromagnetic excitation and capacitative detection,” inProc. 4th Int. Conf. Microelectro, Opto, Mech. Syst. and Components, Berlin, Germany, Oct. 19–21 • 1994

Fabrication and operation of polyimide bimorph actuators for a ciliary motion system

A. Omodaka Ataka, N. Takeshima, H. Fujita
IEEE J . Microelectromech . Syst . • 1993

Similar Papers

Loading similar papers…