Electrostatic self-calibration of vibratory gyroscopes

  title={Electrostatic self-calibration of vibratory gyroscopes},
  author={Giorgio Casinovi and Woong Ki Sung and M. Dalal and A. Noori Shirazi and Farrokh Ayazi},
  journal={2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)},
This paper introduces a new approach to self-calibration of Coriolis-based vibratory gyroscopes that does not require the use of any additional moving parts or a calibration stage. Instead, the effect of the Coriolis force on the device is mimicked by the application of a rotating excitation to the device drive and sense modes. This calibration method is based on the theoretical analysis of an equivalent 2-DOF mass-spring model, which can be used to describe the behavior of a variety of MEMS… CONTINUE READING
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