Electrostatic micromotor and its reliability

  title={Electrostatic micromotor and its reliability},
  author={Wenming Zhang and Guang Meng and Hongguang Li},
  journal={Microelectronics Reliability},
Research and development in microelectromechanical systems (MEMS) have made remarkable progress since the advent of the first electrostatic micromotor in 1987. Considerable efforts have been directed to the investigation of the failure mechanisms and reliability of electrostatic micromotors. This paper provides a brief overview of failure modes and mechanisms and solving methods in electrostatic micromotors that are commonly met. It focuses on the introduction of the failure modes and… CONTINUE READING
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