Electrostatic actuation of thin-film microelectromechanical structures

@inproceedings{Gaspar2003ElectrostaticAO,
  title={Electrostatic actuation of thin-film microelectromechanical structures},
  author={Jo{\~a}o Gaspar and Virginia Chu and Joao Pedro Conde},
  year={2003}
}
Microbridge and cantilever electrostatic actuators are fabricated using thin film technology and surface micromachining at low temperatures (⩽100 °C) on glass substrates. Electrostatic actuation is accomplished by applying a voltage, combining a dc component to a low frequency ac component, between the microstructure and an underlying gate counterelectrode. The movement is optically detected by focusing a laser beam on the top of the structure and monitoring the deviation of the reflected light… CONTINUE READING

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