Electrostatic actuation of thin-film microelectromechanical structures

@article{Gaspar2003ElectrostaticAO,
  title={Electrostatic actuation of thin-film microelectromechanical structures},
  author={J. Gaspar and V. Chu and J. Conde},
  journal={Journal of Applied Physics},
  year={2003},
  volume={93},
  pages={10018-10029}
}
  • J. Gaspar, V. Chu, J. Conde
  • Published 2003
  • Physics
  • Journal of Applied Physics
  • Microbridge and cantilever electrostatic actuators are fabricated using thin film technology and surface micromachining at low temperatures (⩽100 °C) on glass substrates. Electrostatic actuation is accomplished by applying a voltage, combining a dc component to a low frequency ac component, between the microstructure and an underlying gate counterelectrode. The movement is optically detected by focusing a laser beam on the top of the structure and monitoring the deviation of the reflected light… CONTINUE READING
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