Electrostatic Force Microscopy Measurement System for Micro-topography of Non-conductive Devices

@article{He2018ElectrostaticFM,
  title={Electrostatic Force Microscopy Measurement System for Micro-topography of Non-conductive Devices},
  author={Gaofa He and Jie Li Meng and Renbing Tan and Peng Yuan Zhong},
  journal={Measurement Science Review},
  year={2018},
  volume={18},
  pages={256 - 261}
}
A home-made electrostatic force microscopy (EFM) system is described which is directed toward assessment of the microscopic geometry of the surface of specimens made of non-conductive material with a large thickness. This system is based on the variation in the electrostatic force between the conductive probe and the non-conductive specimen in order to get its surface morphology. First, based on the principle of dielectric polarization, the variation rules of the electrostatic force between the… CONTINUE READING

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