Electronic Temperature Compensation of Lateral Bulk Acoustic Resonator Reference Oscillators Using Enhanced Series Tuning Technique

@article{Lavasani2012ElectronicTC,
  title={Electronic Temperature Compensation of Lateral Bulk Acoustic Resonator Reference Oscillators Using Enhanced Series Tuning Technique},
  author={Hossein Miri Lavasani and Wanling Pan and Brandon Harrington and Reza Abdolvand and Farrokh Ayazi},
  journal={IEEE Journal of Solid-State Circuits},
  year={2012},
  volume={47},
  pages={1381-1393}
}
This paper reports on the demonstration of series tuning for lateral micromechanical oscillators and its application for electronic temperature compensation of piezoelectric lateral bulk acoustic resonator (LBAR) micromechanical oscillators. Two aluminum nitride-on-silicon (AlN-on-Si) piezoelectric LBARs, one operating at 427 MHz (Rm ≈180 Ω, Qunloaded ≈ 1400) and the other operating at 541 MHz (Rm ≈ 55 Ω, Qunloaded ≈ 3000) are interfaced with a 13 mW three-stage tunable TIA implemented in 0.18… CONTINUE READING
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