# Electron heating via self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas

@article{Schuengel2015ElectronHV, title={Electron heating via self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas}, author={Edmund Schuengel and S Brandt and Zolt{\'a}n Donk{\'o} and Ihor Korolov and Aranka Derzsi and Julian Schulze}, journal={Plasma Sources Science and Technology}, year={2015}, volume={24} }

The self-excitation of plasma series resonance (PSR) oscillations plays an important role in the electron heating dynamics in capacitively coupled radio-frequency (CCRF) plasmas. In a combined approach of PIC/MCC simulations and a theoretical model based on an equivalent circuit, we investigate the self-excitation of PSR oscillations and their effect on the electron heating in geometrically symmetric CCRF plasmas driven by multiple consecutive harmonics. The discharge symmetry is controlled via…

## 29 Citations

### The electrical asymmetry effect in a multi frequency geometrically asymmetric capacitively coupled plasma: A study by a nonlinear global model

- Physics
- 2018

We investigate the electrical asymmetry effect (EAE) and the current dynamics in a geometrically asymmetric capacitively coupled radio frequency plasma driven by multiple consecutive harmonics based…

### Magnetic attenuation of the self-excitation of the plasma series resonance in low-pressure capacitively coupled discharges

- PhysicsPlasma Sources Science and Technology
- 2021

External magnetic fields impose diverse effects on low-temperature plasmas. We study these in a low-pressure capacitively coupled radio frequency plasma in argon via self-consistent kinetic…

### Electron heating enhancement due to plasma series resonance in a capacitively coupled RF discharge: Electrical modeling and comparison to experimental measurements

- Physics
- 2016

The electron heating enhancement due to the self-excitation of the plasma series resonance in capacitively coupled plasmas is revisited by a combination of an equivalent circuit model and…

### Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects

- Physics
- 2016

Capacitively coupled radio frequency plasmas operated in an electronegative gas (CF4) and driven by voltage waveforms composed of four consecutive harmonics are investigated for different fundamental…

### Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4

- Physics
- 2016

The power absorption dynamics of electrons and the electrical asymmetry effect in capacitive radio-frequency plasmas operated in CF4 and driven by tailored voltage waveforms are investigated…

### Electron dynamics in low pressure capacitively coupled radio frequency discharges

- Physics
- 2020

In low temperature plasmas, the interaction of the electrons with the electric field is an important current research topic that is relevant for many applications. Particularly, in the low pressure…

### Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect

- Physics
- 2015

Unequal areas of the powered and grounded electrodes in single-frequency capacitively coupled plasmas (CCPs) are well-known to generate a DC self-bias voltage and an asymmetric plasma response. By…

### The PSR effect of matching network in 8/100 MHz geometrically symmetrical capacitively coupled Ar plasma

- PhysicsPhysics of Plasmas
- 2022

The high-order harmonics caused by the self-excitation of nonlinear plasma series resonance (PSR) in a geometrically symmetric (8 + 100) MHz capacitively coupled argon plasma are studied by using a…

### Striations in electronegative capacitively coupled radio-frequency plasmas: analysis of the pattern formation and the effect of the driving frequency

- Physics
- 2017

Self-organized striated structures of the plasma emission have recently been observed in capacitive radio-frequency CF4 plasmas by phase resolved optical emission spectroscopy (PROES) and their…

### Control of charged particle dynamics in capacitively coupled plasmas driven by tailored voltage waveforms in mixtures of Ar and CF4

- PhysicsPlasma Sources Science and Technology
- 2019

The charged-particle power absorption dynamics in capacitively coupled plasmas operated in different CF4-Ar gas mixtures and driven by tailored voltage waveforms is experimentally investigated by…

## References

SHOWING 1-10 OF 114 REFERENCES

### On the self-excitation mechanisms of plasma series resonance oscillations in single- and multi-frequency capacitive discharges

- Physics
- 2015

The self-excitation of plasma series resonance (PSR) oscillations is a prominent feature in the current of low pressure capacitive radio frequency discharges. This resonance leads to high frequency…

### Self-excitation of the plasma series resonance in radio-frequency discharges: An analytical description

- Physics
- 2006

Self-excited plasma series resonances (PSR) are observed in capacitve discharges as high-frequency oscillations superimposed on the normal rf current. This high-frequency contribution to the current…

### Self-excited nonlinear plasma series resonance oscillations in geometrically symmetric capacitively coupled radio frequency discharges

- Physics
- 2009

At low pressures, nonlinear self-excited plasma series resonance (PSR) oscillations are known to drastically enhance electron heating in geometrically asymmetric capacitively coupled radio frequency…

### Nonlinear plasma dynamics in capacitive radio frequency discharges

- Physics
- 2007

The excitation of harmonics in the current of capacitive radio frequency (RF) discharges is a frequently observed phenomenon. The effect is of interest for several reasons. It forms, for instance,…

### Radio-frequency capacitively coupled plasmas in hydrogen excited by tailored voltage waveforms: comparison of simulations with experiments

- Physics
- 2014

A combined computational–experimental study was performed of a geometrically symmetric capacitively coupled plasma in hydrogen sustained by tailored voltage waveforms consisting of the sum of up to…

### Influence of finite geometrical asymmetry of the electrodes in capacitively coupled radio frequency plasma

- Physics
- 2014

Capacitively coupled radio frequency (CCRF) plasmas are widely studied in last decades due to the versatile applicability of energetic ions, chemically active species, radicals, and also energetic…

### The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges

- Physics
- 2011

The electrical asymmetry effect (EAE) in geometrically symmetric capacitively coupled radio frequency discharges operated at multiple consecutive harmonics is investigated by a particle-in-cell (PIC)…

### Diagnostics of the plasma series resonance effect in radio-frequency discharges

- Physics
- 2007

The intention of the paper is to give an example on how different plasma diagnostics can be combined in a synergistic way in order to investigate new physics. The link between the individual…

### Nonlinear Plasma Dynamics in Electron Heating of Asymmetric Capacitive Discharges with a Fluid Sheath Model

- Physics
- 2011

A fluid radio-frequency (rf) sheath model coupled to an equivalent circuit method is adopted to describe the nonlinear series resonance effects due to nonlinear interaction of plasma bulk and sheath…

### Nonlinear Plasma Dynamics in Electron Heating of Asymmetric Capacitive Discharges with a Fluid Sheath Model

- Physics
- 2011

A fluid radio-frequency (rf) sheath model coupled to an equivalent circuit method is adopted to describe the nonlinear series resonance effects due to nonlinear interaction of plasma bulk and sheath…