Electron beam poling of thin fluoropolymer layers

  title={Electron beam poling of thin fluoropolymer layers},
  author={Rudi Danz and Manfred Pinnow and Andreas Buechtemann and Armin Wedel},
Electron beam poling by use of a scanning electron microscope was developed and applied to thin polymer layers. The electron beam charging process was studied by measurement of the surface potential, dependent on the acceleration voltage. The induced orientation of CF/sub 2/ dipole groups of the ferroelectric copolymer vinylidene fluoride/trifluoroethylene was detected by means of IR spectroscopy as well as by nonlinear optical methods. Using electron beam microlithography, microscopic… CONTINUE READING