Electron beam induced deposition of silicon nanostructures from a liquid phase precursor.

@article{Liu2012ElectronBI,
  title={Electron beam induced deposition of silicon nanostructures from a liquid phase precursor.},
  author={Yin Liu and Xin Chen and Kyong Wook Noh and Shen J Dillon},
  journal={Nanotechnology},
  year={2012},
  volume={23 38},
  pages={385302}
}
This work demonstrates electron beam induced deposition of silicon from a SiCl(4) liquid precursor in a transmission electron microscope and a scanning electron microscope. Silicon nanodots of tunable size are reproducibly grown in controlled geometries. The volume of these features increases linearly with deposition time. The results indicate that secondary electrons generated at the substrate surface serve as the primary source of silicon reduction. However, at high current densities the… CONTINUE READING
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