Electron beam deposition of gold nanostructures in a reactive environment

Abstract

Electron beam deposition ~EBD! is a maskless technique suitable for the fabrication of nanometer scale structures. Metals can be deposited from an organometallic gas, but simultaneous carbon deposition typically yields grossly impure ~;25% metal! deposits. We have found that the metal content of the deposited solid is dramatically improved by performing the… (More)

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