Electromechanical modelling of high power RF-MEMS switches with ohmic contact

@article{Tan2005ElectromechanicalMO,
  title={Electromechanical modelling of high power RF-MEMS switches with ohmic contact},
  author={S. G. Tan and E. P. McErlean and J. Hong and Zhengying Cui and Leon Wang and R. B. Greed and D. C. Voyce},
  journal={European Gallium Arsenide and Other Semiconductor Application Symposium, GAAS 2005},
  year={2005},
  pages={505-508}
}
This paper presents a study of the behaviour of electrically actuated RF-MEMS switches with ohmic contact. We will discuss about the relationship between the actuation voltage, displacement and the corresponding contact force experienced by the switch. We will demonstrate the linear behaviour of the switch when factors such as width or length of the switch… CONTINUE READING