Electromagnetically actuated ball valve micropumps

@article{Yamahata2005ElectromagneticallyAB,
  title={Electromagnetically actuated ball valve micropumps},
  author={Christophe Yamahata and Fr{\'e}d{\'e}ric Lacharme and J{\"u}rg M. Matter and Silvan Schnydrig and Yves Burri and M. Gijs},
  journal={The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.},
  year={2005},
  volume={1},
  pages={192-196 Vol. 1}
}
We present two types of oscillating diaphragm micropumps configured with passive ball valves and using electromagnetic actuation. One type is made out of poly(methyl methacrylate) (PMMA), while the other one is made out of borosilicate glass. Both were produced using the powder blasting microfabrication method. The pumping resonant frequency was measured to be within the range of 20-30 Hz for both prototypes. At resonance, a maximum backpressure of 280 mbar and a maximum water flow rate of… CONTINUE READING

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