Electromagnetic biaxial microscanner with mechanical amplification at resonance.

@article{Cho2015ElectromagneticBM,
  title={Electromagnetic biaxial microscanner with mechanical amplification at resonance.},
  author={Ah Ran Cho and Aleum Han and Suna Ju and Haesoo Jeong and Jae-Hyoung Park and Inhoi Kim and Jong-Uk Bu and Chang-Hyeon Ji},
  journal={Optics express},
  year={2015},
  volume={23 13},
  pages={16792-802}
}
We present the design, fabrication, and measurement results of an electromagnetic biaxial microscanner with mechanical amplification mechanism. A gimbaled scanner with two distinct single-crystal silicon layer thicknesses and integrated copper coils has been fabricated with combination of surface and bulk micromachining processes. A magnet assembly consisting of an array of permanent magnets and a pole piece has been placed under the substrate to provide high strength lateral magnetic field… CONTINUE READING

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