Electromagnetic actuator, a manufacturing method of the electromagnetic actuator, an optical deflector using the electromagnetic actuator

@inproceedings{2000ElectromagneticAA,
  title={Electromagnetic actuator, a manufacturing method of the electromagnetic actuator, an optical deflector using the electromagnetic actuator},
  author={隆行 八木 and 貴久 加藤 and 進 安田 and 太 廣瀬},
  year={2000}
}